Our fully
integrated pump and abatement systems will bring significant benefits to EUV
lithography manufacturing. Our innovative leading technology
solutions and systemisation capabilities will bring improved process up-time,
yield, throughput and safety compliance whilst striving to balance the often
conflicting requirements of:
- Lower
cost of ownership through reduction in consumables usage (electrical power,
fuel gas, nitrogen and cooling water),
- Reduced
environmental emissions (noise, vibration, sub-fab particles, waste gas and
waste water),
- Extended
product lifetimes and reduction in on-going service costs.
EZENITH offers an advanced portfolio of systems providing fully
integrated vacuum and exhaust management solutions for all of your
semiconductor processes applications. EZENITH systems are unique in offering:
- Process-Centric Vacuum & Exhaust Management
- Complete Integration of Components
- Support of each function with a powerful, Integrated Control Interface
- Designed for Efficient use of Space - for Savings of up to 70%
- Full Internal Distribution, regulation and
monitoring of services reducing utility hook-up by over 60% while ensuring smooth and
reliable operation
With just a
pump and a gas abatement device, you still are not ready to run your process.
You will need to connect the pump exhaust, connect up your line heaters where
required, run your water, purge and electrical lines, and then get all of your
control signals ready. You will also have to consider double-enclosure, gas
leak detection, and how you want to conduct leak checks after your tool
maintenance. All of these things will cost you design time and money. We
understand the problem so we have developed integrated, process-specific
solutions.
Our integrated systems are already pre-designed for
most semiconductor processes. The exhaust heaters are set for the correct
temperature to minimize cost and maximise up-time. We put leak check ports and
gate valves where they are required. The whole system is enclosed and, most
importantly, you only need to provide one of each of the required utilities. We
distribute the gases, water, electricity, and control signals where they are
needed and create a ready-to-go system.