As soluções de vácuo e redução completamente
integradas e flexíveis da Edwards garantem uma operação segura em processos
perigosos e reduzem os custos de operação gerais.
A Edwards dedica-se a fornecer as soluções ideais para processos de semicondutores e a experiência da empresa em soluções de subfabricação é incomparável. A experiência global em aplicações da Edwards garante que cada sistema conte com os melhores hardwares e
softwares, com as melhores práticas de gerenciamento de exaustão e vácuo, equipamentos auxiliares adequados, proporcionando a instalação ideal com a operação mais confiável.
Todos os sistemas integrados da Edwards foram desenvolvidos com base em experiência global. A Edwards é líder em vácuo e redução e sabe o que funciona. A Edwards realiza inovações e melhorias constantes porque você exige excelência.
integrated pump and abatement systems will bring significant benefits to EUV
lithography manufacturing. Our innovative leading technology
solutions and systemisation capabilities will bring improved process up-time,
yield, throughput and safety compliance whilst striving to balance the often
conflicting requirements of:
EZENITH offers an advanced portfolio of systems providing fully
integrated vacuum and exhaust management solutions for all of your
semiconductor processes applications. EZENITH systems are unique in offering:
With just a
pump and a gas abatement device, you still are not ready to run your process.
You will need to connect the pump exhaust, connect up your line heaters where
required, run your water, purge and electrical lines, and then get all of your
control signals ready. You will also have to consider double-enclosure, gas
leak detection, and how you want to conduct leak checks after your tool
maintenance. All of these things will cost you design time and money. We
understand the problem so we have developed integrated, process-specific
Our integrated systems are already pre-designed for
most semiconductor processes. The exhaust heaters are set for the correct
temperature to minimize cost and maximise up-time. We put leak check ports and
gate valves where they are required. The whole system is enclosed and, most
importantly, you only need to provide one of each of the required utilities. We
distribute the gases, water, electricity, and control signals where they are
needed and create a ready-to-go system.
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History
Learn more about our Integrated Solutions product offerings...
Integrated & Exhaust Management Solutions Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
Learn more about FabWorks Obsolescence