iXL High Performance Dry Vacuum Pumps

iXL120: A compact, low-energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. One of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to preserve the environment.

• Class leading chamber pump down time reduces Total Average Cycle Time (TACT)
• Only 0.55kW power consumption helps minimise customer cost of ownership
• Green Mode can reduce power consumption by up to 92% during idle periods
• Up to 35^oC water supply helps reduce facility cooling water requirements
• Extremely small and light, helping to save valuable fab space

iXL1000: A low energy compact dry pump for light duty applications. It provides fast chamber pump down and extremely low power usage. One of the smallest and quietest pumps available for light duty applications such as wafer handling, PVD and metrology. Building on the highly successful iXL120 pump, it features high pumping speed and low energy consumption. A Green Mode allows reduced utilities usage during idle periods, lowering costs and helping to preserve the environment.

• Class leading chamber pump down time reduces Total Average Cycle Time (TACT)
• Only 0.55kW power consumption helps minimise customer cost of ownership
• Green Mode can reduce power consumption by up to 92% during idle periods
• Up to 35oC water supply helps reduce facility cooling water requirements
• Extremely small and light, helping to save valuable fab space

IPUP2: A compact, low energy, 180m³/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with low energy consumption.

IPUP2 is small and light for load lock and clean applications. It’s low vibration and low noise levels make it ideal for on-tool use or within a fab’s waffle floor, helping to save valuable fab floor space while maximising pumping performance. Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to preserve the environment.

For use on Applied Materials' process platforms improves throughput while using less energy.

• 3,000,000 million cycle MTBF
• 50% faster using 70% less energy than the original IPUP™
• Drop-in replacement for existing IPUP™