• iGX Dry Pump Vacuum System

    The iGX dry vacuum pump series sets new standards for the modern dry pump with zero maintenance between overhauls; this has led to it being one of the world’s most popular dry pumps with over 20,000 units installed in most leading 300mm fabs.  iGX range includes both MicroTIM tool interfacing and Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options, to assure continuous pump availability.

    iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pump to suit individual fab requirements. A compact footprint allows installation options including on-tool, close proximity, or remote operation.

    Typically a 40%*saving can be made on utilities costs over an entire fab by utilising iGX dry pump technologies (compared to iL/iH dry pumps).   

    *Based on a 300mm fab in the US, containing 200 tools, 537 pumps / 70% iGX pumps, 30% iH pumps/iGX fitted with constant flow water valve.


  • Applications
    Key Features & Benefits
    Pump Ranges
  • Our History

    When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History

  • Product Documentation

    Learn more about the iGX product line...

    iGX Dry Pumps Product Brochure

  • FabWorks Obsolescence


    Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017

    Learn more about FabWorks Obsolescence

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