• Vacuum Pump Systems For Manufacturers Of Microelectronic Devices, Including Semiconductors

  • Edwards offers a unique range of equipment solutions, support services and technical expertise to meet application needs in the manufacture of microelectronic devices, including silicon and compound semiconductors.

  • Edwards' Leading Technology

  • Semiconductor Processing

    We continue to innovate leading technology solutions which will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emissions and extended product lifetimes with a reduction in on-going service costs.

    Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our systems are designed to meet the specific requirements of existing and developing processes. A variety of systems, such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise performance across the range of applications, from light duty to the heaviest duty processes.

  • Lithography
    Chemical Vapour Deposition
    Physical Vapour Deposition
    Ion Implantation
    Diffusion / Epitaxy / ALD


    Our Memberships

    Edwards participates in several semi memberships globally.

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