• World-Class Solutions - Edwards Pumps & Abatement Systems


  • Our Most In-Demand Products

    • Product_Rotator_Atlas_Abatement Atlas Abatement
      Combustion gas abatement solutions that offers Semiconductor, Flat Panel Display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use.
      Find out more
    • Product_Rotator_EPX_Pump EPX Dry Pumps
      Supporting clean and light duty Semiconductor Processing applications such as ash/strip and implant end station applications.
      Find out more
    • Product_Rotator_IPUP2 IPUP2 Dry Pump
      Compact, low-energy, 180m3/h Dry Pump for wafer handling and other clean duty applications. Fast pump down of load lock chambers with low energy consumption. 
      Find out more
    • Product_Rotator_iXL120 iXL Dry Pumps
      Covering the entire range of pump-down requirements encountered in the Flat Panel Display (FPD) and Solar Manufacturing market sectors.
      Find out more
    • Product_Rotator_CXS_Pump CXS Dry Pumps
      Offering high reliability and effluent-free pumping; even in the most difficult of harsh chemical and pharmaceutical processing applications.
      Find out more
    • Product_Rotator_Gamma_Ion Gamma UHV Pumps
      Creating high-vacuum and ultra-high vacuum (UHV) environments in a variety of applications, ranging from portable mass spectrometers to large scale particle accelerators.
      Find out more
    • Product_Rotator_GXS_Pump GXS Dry Pumps
      Unique screw technology and leading high efficiency drives; enabling advanced temperature control and long service intervals; ensuring best-in-class pumping speeds and low running costs.
      Find out more
    • Product_Rotator_IXH_Pump iXH Dry Pumps
      High peak pumping speeds; equipped with features to ensure maximum reliability on harsh processes. Meeting the ever increasing gas flow requirements encountered in the FPD, Solar Semiconductor and LED manufacturing industries. 
      Find out more
    • Product_Rotator_nEXT_Pump nEXT Turbo Pumps
      Setting the new benchmark for scientific turbo pumps. Offering the best turbo pump performance, reliability and end-user serviceability.
      Find out more
    • Product_Rotator_nXDS_Pump nXDS Scroll Pumps
      Exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features; the best performing pump in its class.
      Find out more
    • Product_Rotator_SpectraG_Abatement Spectra G Abatement
      Cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.
      Find out more
    • Product_Rotator_STP_Pump STP Turbo Pumps
      Multi-axis magnetic bearing system used to suspend the rotor during operation, ensuring there is no risk of contamination while minimizing vibration, noise and maintenance requirements. The first choice for high-up time, hydrocarbon free pumping.
      Find out more
    • Product_Rotator_iGX iGX Dry Pumps
      Available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes.
      Find out more
    • Product_Rotator_EZENITH EZENITH
      An advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor process applications.
      Find out more
    • Product_Rotator_iH1000 iH Dry Pumps
      Highly reliable, low-cost pump for difficult processes where particulate, condensable or corrosive by-products are present.
      Find out more
    • Product_Rotator_ES_Pump ES Pumps
      Maximise your productivity and performance. Significant advancement in single stage oil-sealed rotary vane pumps.
      Find out more
    • Product_Rotator_Atlas_Abatement Atlas Abatement
      Combustion gas abatement solutions that offers Semiconductor, Flat Panel Display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use.
      Find out more
    • Product_Rotator_EPX_Pump EPX Dry Pumps
      Supporting clean and light duty Semiconductor Processing applications such as ash/strip and implant end station applications.
      Find out more
    • Product_Rotator_IPUP2 IPUP2 Dry Pump
      Compact, low-energy, 180m3/h Dry Pump for wafer handling and other clean duty applications. Fast pump down of load lock chambers with low energy consumption. 
      Find out more
    • Product_Rotator_iXL120 iXL Dry Pumps
      Covering the entire range of pump-down requirements encountered in the Flat Panel Display (FPD) and Solar Manufacturing market sectors.
      Find out more
    • Product_Rotator_CXS_Pump CXS Dry Pumps
      Offering high reliability and effluent-free pumping; even in the most difficult of harsh chemical and pharmaceutical processing applications.
      Find out more
    • Product_Rotator_Gamma_Ion Gamma UHV Pumps
      Creating high-vacuum and ultra-high vacuum (UHV) environments in a variety of applications, ranging from portable mass spectrometers to large scale particle accelerators.
      Find out more
    • Product_Rotator_GXS_Pump GXS Dry Pumps
      Unique screw technology and leading high efficiency drives; enabling advanced temperature control and long service intervals; ensuring best-in-class pumping speeds and low running costs.
      Find out more
    • Product_Rotator_IXH_Pump iXH Dry Pumps
      High peak pumping speeds; equipped with features to ensure maximum reliability on harsh processes. Meeting the ever increasing gas flow requirements encountered in the FPD, Solar Semiconductor and LED manufacturing industries. 
      Find out more
    • Product_Rotator_nEXT_Pump nEXT Turbo Pumps
      Setting the new benchmark for scientific turbo pumps. Offering the best turbo pump performance, reliability and end-user serviceability.
      Find out more
    • Product_Rotator_nXDS_Pump nXDS Scroll Pumps
      Exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features; the best performing pump in its class.
      Find out more
    • Product_Rotator_SpectraG_Abatement Spectra G Abatement
      Cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.
      Find out more
    • Product_Rotator_STP_Pump STP Turbo Pumps
      Multi-axis magnetic bearing system used to suspend the rotor during operation, ensuring there is no risk of contamination while minimizing vibration, noise and maintenance requirements. The first choice for high-up time, hydrocarbon free pumping.
      Find out more
    • Product_Rotator_iGX iGX Dry Pumps
      Available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes.
      Find out more
    • Product_Rotator_EZENITH EZENITH
      An advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor process applications.
      Find out more
    • Product_Rotator_iH1000 iH Dry Pumps
      Highly reliable, low-cost pump for difficult processes where particulate, condensable or corrosive by-products are present.
      Find out more
    • Product_Rotator_ES_Pump ES Pumps
      Maximise your productivity and performance. Significant advancement in single stage oil-sealed rotary vane pumps.
      Find out more

  • Download the entire publication with the Download_Icon icon.

    Print just the pages you need with the Print_Icon icon.

    Unable to View our Interactive Product Catalogue? | Download the PDF Version