EPX Vacuum Dry Pumps
The EPX Series supports clean and light
duty semiconductor processing applications such as ash/strip and implant end
station applications.
The EPX Series offers on-tool pumping in a very light small package and delivering exceptionally clean vacuum.. Using a unique, patented, single-shaft regenerative Holweck® stage mechanism, EPX pumps are capable of evacuating from atmosphere to ultimate pressures of Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated MicroTIM electronics also provide simple communication connections to the process tool.
